Development of radio-frequency magnetron sputtered indium molybdenum oxide
- 30 June 2003
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 21 (4), 1092-1097
- https://doi.org/10.1116/1.1586281
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
- Neutron diffraction study on the defect structure of indium–tin–oxideJournal of Applied Physics, 2001
- Characterization of Transparent Conducting OxidesMRS Bulletin, 2000
- Criteria for Choosing Transparent ConductorsMRS Bulletin, 2000
- Applications and Processing of Transparent Conducting OxidesMRS Bulletin, 2000
- Low energy rf sputtering system for the deposition of ITO thin filmsElectrochimica Acta, 1999
- Electrical and optical properties of indium tin oxide thin films prepared on low-temperature substrates by rf magnetron sputtering under an applied external magnetic fieldJournal of Applied Physics, 1988
- Evaporated Sn-doped In2O3 films: Basic optical properties and applications to energy-efficient windowsJournal of Applied Physics, 1986
- Transparent heat-reflecting coatings for solar applications based on highly doped tin oxide and indium oxideSolar Energy Materials, 1983
- Electrical properties and defect model of tin-doped indium oxide layersApplied Physics A, 1982
- X-ray photoemission spectroscopy studies of Sn-doped indium-oxide filmsJournal of Applied Physics, 1977