Reduction of Metal Oxides by Electron Cyclotron Resonance (ECR) Plasma of Hydrogen–A Model Study on Discharge Cleaning
- 1 May 1980
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 19 (5)
- https://doi.org/10.1143/jjap.19.839
Abstract
A reduction experiment on oxides of Cu, Ni, Fe, Mo and Ti was carried out, using a low electron temperature ECR plasma of hydrogen. Reduction rates of these oxides were estimated by observing the disappearance of interference rings of oxide layers. The reduction efficiency η of H+ flux was evaluated; η=0.4 for copper oxide and 10-3<η-2 for other oxides. Roughly, the reduction rate decreased with an increase in the metal-oxygen binding energy. It was shown that oxide layers with a thickness in the order of magnitude 10-1 µm were reduced without difficulty. It is of interest from the viewpoint of discharge cleaning of fusion-oriented machines.Keywords
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