Amorphous Si-F-H solar cells prepared by dc glow discharge

Abstract
Amorphous Si‐F‐H films were prepared by dc glow discharge in an atmosphere of SiF4 + H2. Optical and electrical measurements have been performed to evaluate the film quality. The photoconductivity of amorphous Si‐F‐H solar cell showed the efficiency of 1.3% under simulated AM1, 100‐mW/cm2 insulation.