Polarity effect on the temperature dependence of leakage current through HfO2/SiO2 gate dielectric stacks
- 18 March 2002
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 80 (11), 1975-1977
- https://doi.org/10.1063/1.1435411
Abstract
No abstract availableKeywords
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