Experimental investigation of the angular dependence of Be self-sputtering
- 30 April 1995
- journal article
- Published by Elsevier in Journal of Nuclear Materials
- Vol. 220-222, 883-885
- https://doi.org/10.1016/0022-3115(94)00603-2
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Reflection and self-sputtering of nickel at oblique angles of ion incidenceNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1994
- An ion optical decel system for oblique angular impact of low-energy ions on targetsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1992
- Sputtering of low-Z materialsJournal of Nuclear Materials, 1991
- The effects of surface roughness characterized by fractal geometry on sputteringNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1990
- Beryllium self-sputtering: An interpolation of data for D, He, Ne and ArJournal of Nuclear Materials, 1989
- Low-energy ion beam work for the preparation of various delicate isotopic samples as well as for sputtering and implantation tasksNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987