Dependence of sputtering coefficient on ion dose
- 1 January 1977
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects
- Vol. 32 (3-4), 193-197
- https://doi.org/10.1080/00337577708233074
Abstract
The sputtering coefficient of polycrystalline gold bombarded by 10–40 keV Ar+ ions has been measured as a function of total ion dose and shown to exhibit oscillations in magnitude between 30 and 100%. Possible experimental errors which would give rise to such an oscillation have been considered, but it is apparent that these factors are unable to explain the measurements. It is proposed that a change in the Sublimation Energy associated with either bulk damage or formation of surface topographical features arising during ion bombardment may be responsible for the observed variations in sputtering coefficient.Keywords
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