Aberration Measurement by Confocal Interferometry
- 1 February 1989
- journal article
- research article
- Published by Taylor & Francis in Journal of Modern Optics
- Vol. 36 (2), 233-250
- https://doi.org/10.1080/09500348914550281
Abstract
The aberrations and apodization of microscope objectives have been measured by observation of the defocus signal in a confocal interference microscope system. Phase distortions can be measured to approximately λ/100, and quantitative information is given about the imaging performance of the lenses in situ in the optical system.Keywords
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