Velocity distribution of molecular fragments from polymethylmethacrylate irradiated with UV laser pulses
- 20 January 1986
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 48 (3), 212-214
- https://doi.org/10.1063/1.96798
Abstract
Polymethylmethacrylate samples are irradiated with pulses from an ArF excimer laser at λ=193 nm. The velocities of ablated particles are measured with the use of a quadrupole mass spectrometer. For laser fluences <120 mJ/cm2 we observe thermal, Maxwell–Boltzmann velocity distributions. The photofragments possess a common temperature which increases with fluence to values as high as 3000 K.Keywords
This publication has 8 references indexed in Scilit:
- Calorimetric and acoustic study of ultraviolet laser ablation of polymersApplied Physics Letters, 1985
- Spectroscopic studies of ArF laser photoablation of PMMAApplied Physics A, 1985
- Theory of etching of polymers by far-ultraviolet high-intensity pulsed laser- and long-term irradiationThe Journal of Physical Chemistry, 1984
- Direct high-resolution excimer laser photoetchingApplied Physics A, 1984
- Direct etching of polymeric materials using a XeCl laserApplied Physics Letters, 1983
- Kinetics of the ablative photodecomposition of organic polymers in the far ultraviolet (193 nm)Journal of Vacuum Science & Technology B, 1983
- Free-Jet Expansions from Laser-Vaporized Planar SurfacesAIAA Journal, 1977
- Dynamic sampling of laser-induced vapor plumes by mass spectrometryInternational Journal of Mass Spectrometry and Ion Physics, 1975