Arrays of silicon microdischarge devices with multicomponent dielectrics

Abstract

Arrays as large as $15\times 15$ of microdischarge devices having inverted pyramidal silicon cathodes $\left(50 \mu \mathrm{m}\times 50 \mu \mathrm{m}\right)$ and ${\mathrm{SiO}}_2–{\mathrm{Si}}_3{\mathrm{N}}_4–\mathrm{polymer}$ composite dielectrics have been fabricated and characterized with Ne gas. The lifetimes, reliability, and ignition characteristics of the arrays are superior to those of earlier designs having a single polymer dielectric. Operating voltages as low as 150 V for a $10\times 10$ pixel array and 1000 Torr of Ne have been measured. Single $\left(50 \mu \mathrm{m}\times 50 \mu \mathrm{m}\right)$ pyramidal cathode devices operate at voltages as low as 113 V when the Ne pressure is 900 Torr.