Interaction of Si3N4 with titanium powder
- 1 July 1990
- journal article
- Published by Springer Nature in Journal of Materials Science Letters
- Vol. 9 (7), 813-815
- https://doi.org/10.1007/bf00720167
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Interactions of thin Ti films with Si, SiO2, Si3N4, and SiOxNy under rapid thermal annealingJournal of Applied Physics, 1988
- Thin-film reaction between Ti and Si3N4Applied Physics Letters, 1987
- Reaction of titanium with silicon nitride under rapid thermal annealingApplied Physics Letters, 1986
- Phase equilibria in thin-film metallizationsJournal of Vacuum Science & Technology B, 1984