Platinum alloys and iridium bottom electrodes for perovskite based capacitors in dram applications
- 1 May 1995
- journal article
- Published by Taylor & Francis in Integrated Ferroelectrics
- Vol. 8 (3-4), 299-308
- https://doi.org/10.1080/10584589508219664
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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