Silicon homoepitaxial thin films via silane pyrolysis: A HEED and Auger electron spectroscopy study
- 30 April 1972
- journal article
- Published by Elsevier in Surface Science
- Vol. 30 (2), 310-334
- https://doi.org/10.1016/0039-6028(72)90005-2
Abstract
No abstract availableKeywords
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