A high resolution beam scanning system for deep ion beam lithography
- 1 March 1998
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 136-138, 385-389
- https://doi.org/10.1016/s0168-583x(97)00878-1
Abstract
No abstract availableKeywords
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- The National University of Singapore nuclear microscope facilityNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1994
- Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)Microelectronic Engineering, 1986