Application of dynamic emittance matching to secondary ion mass spectrometry

Abstract

The implementation of the dynamic emittance matching (DEM) concept into our secondary ion mass spectrometer is described. The importance of this feature is presented in terms of increased ion transmission when operating at low primary ion beam fluxes, that is, the static secondary ion mass spectrometry (SIMS) or molecular SIMS mode. A discussion of the principle and the design of the DEM electronics in the system is given. Experimental comparisons are presented and discussed which contrast DEM and conventional results with respect to viewing area, ion transmission, and imaging capability.