Gasphasenepitaxie von titankarbid, titannitrid und titankarbonitrid
- 28 February 1977
- journal article
- Published by Elsevier in Journal of the Less Common Metals
- Vol. 51 (2), 235-249
- https://doi.org/10.1016/0022-5088(77)90085-6
Abstract
No abstract availableKeywords
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