Mechanism of organization of three-dimensional islands in SiGe/Si multilayers
- 1 December 1997
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 71 (22), 3233-3235
- https://doi.org/10.1063/1.120300
Abstract
The organization of coherent three-dimensional islands during the growth of SiGe/Si multilayers on Si(100) was investigated with cross-sectional transmission electron microscopy. Merging of islands of different initial size is found to be the dominant mechanism leading to a uniform size distribution. Upon overgrowth with Si, we observe a change of the shape of the islands from the {105}-faceted “hut” to a boxlike shape bounded on top by a (100) facet.Keywords
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