GaAs single-mode rib waveguides with reactive ion-etched totally reflecting corner mirrors
- 1 August 1985
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Lightwave Technology
- Vol. 3 (4), 785-788
- https://doi.org/10.1109/jlt.1985.1074269
Abstract
The fabrication and optical properties of reactive ion-etched, totally reflecting mirrors for single-mode GaAs rib waveguides are described. Low loss and orientation independance make the device useful in integrated optics, in order to increase packing density and to facilitate waveguide to fiber coupling. Results of displacement sensitivity calculations are also shown.Keywords
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