A low-frequency micromechanical resonant vibration sensor for wear monitoring
- 10 July 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 62 (1-3), 616-620
- https://doi.org/10.1016/s0924-4247(97)01609-9
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A novel resonant silicon accelerometer in bulk-micromachining technologySensors and Actuators A: Physical, 1995
- A surface micromachined silicon accelerometer with on-chip detection circuitrySensors and Actuators A: Physical, 1994
- An introduction to acoustic emissionJournal of Physics E: Scientific Instruments, 1987