A novel resonant silicon accelerometer in bulk-micromachining technology
- 1 January 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 46 (1-3), 185-189
- https://doi.org/10.1016/0924-4247(94)00887-n
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- A technology for the monolithic fabrication of a pressure sensor and related circuitrySensors and Actuators A: Physical, 1995
- Thermally driven micromechanical bridge resonatorsSensors and Actuators A: Physical, 1994
- Three-dimensional structures obtained by double diffusion and electrochemical etch stopJournal of Micromechanics and Microengineering, 1993
- Etching front control of strips for corner compensationSensors and Actuators A: Physical, 1993
- Resonating microbridge mass flow sensorSensors and Actuators A: Physical, 1990
- A thermally-excited silicon accelerometerSensors and Actuators, 1989
- Electrothermally excited silicon beam mechanical resonatorsElectronics Letters, 1987
- Resonator sensors-a reviewJournal of Physics E: Scientific Instruments, 1985
- The Resonistor: A Frequency Selective Device Utilizing the Mechanical Resonance of a Silicon SubstrateIBM Journal of Research and Development, 1968