Basic Thin Film Process for Perovskite Ferroelectric Materials
- 1 January 1990
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 27 references indexed in Scilit:
- Epitaxial growth of thin films of BaTiO3 using excimer laser ablationApplied Physics Letters, 1989
- Ferroelectric (Pb,La)(Zr,Ti)O3 epitaxial thin films on sapphire grown by rf-planar magnetron sputteringJournal of Applied Physics, 1986
- Preparation of PbTiO3 Ferroelectric Thin Film by Chemical Vapor DepositionJapanese Journal of Applied Physics, 1982
- Composition of Reactively Sputtered PLZT FilmsJapanese Journal of Applied Physics, 1981
- Epitaxial growth of ferroelectric PLZT thin film and their optical propertiesApplied Physics A, 1980
- Ion-beam deposition of thin films of ferroelectric lead zirconate titanate (PZT)Journal of Applied Physics, 1979
- Electro-optic effects of PLZT thin filmsApplied Physics Letters, 1977
- Ferroelectric PLZT Thin Films Fabricated by RF SputteringJapanese Journal of Applied Physics, 1976
- Capacitance and Field Distributions for Interdigital Surface-Wave TransducersIEEE Transactions on Sonics and Ultrasonics, 1970
- Preparation of Thin BaTiO3 Films by dc Diode SputteringJournal of Applied Physics, 1970