Effect of oxygen addition on microwave plasma CVD of diamond from CH4-H2 mixture
- 1 January 1989
- journal article
- Published by Elsevier in Materials Research Bulletin
- Vol. 24 (1), 87-94
- https://doi.org/10.1016/0025-5408(89)90013-5
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Effects of Oxygen on CVD Diamond SynthesisJapanese Journal of Applied Physics, 1987
- Effect of dilution gases in methane on the deposition of diamond-like carbon in a microwave dischargeThin Solid Films, 1985