Compressive stress of thin cubic BN films prepared by r.f. reactive sputtering on r.f.-biased substrates
- 1 May 1987
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 149 (1), L77-L80
- https://doi.org/10.1016/0040-6090(87)90256-2
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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- Some new results on the fabrication of and the mechanical, electrical and optical properties of i-carbon layersThin Solid Films, 1981
- Intrinsic stress of magnetron-sputtered niobium filmsThin Solid Films, 1979
- Low-energy sputtering yields of nickel as a function of ion mass-a reinvestigationRadiation Effects, 1979
- The compressive stress transition in Al, V, Zr, Nb and W metal films sputtered at low working pressuresThin Solid Films, 1977