Monolithically integrated micro flow sensor for lab-on-chip applications
- 31 March 2005
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 78-79, 164-170
- https://doi.org/10.1016/j.mee.2004.12.022
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Low-cost silicon sensors for mass flow measurement of liquids and gasesSensors and Actuators A: Physical, 1995
- Micro-liquid flow sensorSensors and Actuators A: Physical, 1993