Effect of Metals Used for Schottky Barrier Contacts on DLTS Signals for LEC n-GaAs Crystals
- 1 May 1984
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 23 (5A), L313-315
- https://doi.org/10.1143/jjap.23.l313
Abstract
DLTS signals for midgap electron traps in LEC n-GaAs crystals were found to depend on the species of metals used for Schottky barrier contacts, aluminum and gold, and to change by annealing. SIMS analyses suggested that interfacial reaction between the contact metals and semiconductors was responsible for the change of the DLTS signals.Keywords
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