A variable temperature ultrahigh vacuum atomic force microscope

Abstract

A new atomic force microscope (AFM) that operates in ultrahigh vacuum (UHV) is described. The sample is held fixed with spring clamps while the AMF cantilever and deflection sensor are scanned above it. Thus, the sample is easily coupled to a liquid nitrogen cooled thermal reservoir which allows AFM operation from ≊100 K to room temperature. AFM operation above room temperature is also possible. The microscope head is capable of coarse x‐y positioning over millimeter distances so that AFM images can be taken virtually anywhere upon a macroscopic sample. The optical beam deflection scheme is used for detection, allowing simultaneous normal and lateral force measurements. The sample can be transferred from the AFM stage to a low energy electron diffraction/Auger electron spectrometer stage for surface analysis. Atomic lattice resolution AFM images taken in UHV are presented at 110, 296, and 430 K.