An ultrasensitive silicon pressure-based flowmeter
- 7 January 2003
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 499-502
- https://doi.org/10.1109/iedm.1989.74330
Abstract
No abstract availableKeywords
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- A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivityIEEE Transactions on Electron Devices, 1982