In Situ Quartz Crystal Microbalance and Quadrupole Mass Spectrometry Studies of Atomic Layer Deposition of Aluminum Oxide from Trimethylaluminum and Water
- 18 September 2001
- journal article
- Published by American Chemical Society (ACS) in Langmuir
- Vol. 17 (21), 6506-6509
- https://doi.org/10.1021/la010103a
Abstract
No abstract availableKeywords
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