Nucleation and orientation of sol-gel pzt-films on pt electrodes
- 1 February 1997
- journal article
- research article
- Published by Taylor & Francis in Integrated Ferroelectrics
- Vol. 15 (1-4), 19-28
- https://doi.org/10.1080/10584589708015693
Abstract
The nucleation and preferential orientation of Lead Zirconate-Titanate (PZT) films deposited by sol-gel spin-coating on Pt bottom electrodes is discussed. The crucial role of the Ti adhesion layer is highlighted. A qualitative crystallization model is presented which can explain the nucleation behavior of PZT-films with different Zr/Ti-ratios on different electrode structures as well as the preferential orientation of the PZT-film.Keywords
This publication has 8 references indexed in Scilit:
- Influence of the Pt electrode on the properties of sol-gel PZT-filmsMicroelectronic Engineering, 1995
- Difference in microstructure between PZT thin films on Pt/Ti and those on PtIntegrated Ferroelectrics, 1995
- Effects of Titanium Buffer Layer on Lead-Zirconate-Titanate Crystallization Processes in Sol-Gel Deposition TechniqueJapanese Journal of Applied Physics, 1995
- Orientation of rapid thermally annealed lead zirconate titanate thin films on (111) Pt substratesJournal of Materials Research, 1994
- Electrodes for ferroelectric thin filmsIntegrated Ferroelectrics, 1993
- Preparation of Pb(Zr, Ti)O3 Films on Pt/Ti/Ta Electrodes by Sol-Gel ProcessJapanese Journal of Applied Physics, 1993
- Low temperature perovskite formation of lead zirconate titanate thin films by a seeding processJournal of Materials Research, 1993
- Preferred Orientations for Sol-Gel Derived Plzt Thin LayersMRS Proceedings, 1993