Visible Photoluminescence from Si Microcrystals Embedded in SiO2 Glass Films
- 1 March 1992
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 31 (3B), L365
- https://doi.org/10.1143/jjap.31.l365
Abstract
We report the observation of an efficient visible photoluminescence (PL) from Si microcrystals embedded in SiO2 glass films. The Si microcrystals were formed by the rf magnetron sputtering technique. The peak position of the PL spectra at 77 K shifts to a lower-energy side as the average diameter of the Si microcrystals increases.Keywords
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