MOCVD Growth of ZnSxSe1-x Epitaxial Layers Lattice-Matched to GaAs Using Alkyls of Zn, S and Se
- 1 November 1985
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 24 (11A), L864
- https://doi.org/10.1143/jjap.24.l864
Abstract
ZnS x Se1-x epitaxial layers have been grown on GaAs (100) substrates by metalorganic chemical vapor deposition (MOCVD) using Zn-, S- and Se-alkyls. With this source combination, the premature reaction typically encountered in the conventional MOCVD of zinc chalcogenides using Zn-alkyls and H2S or H2Se can be eliminated. The composition of ZnS x Se1-x is easily controlled by the transport rates of S- and Se-alkyls. High crystalline quality of lattice matched samples is evident from the surface morphology and the line width of double crystal X-ray diffraction.Keywords
This publication has 12 references indexed in Scilit:
- Coherent Growth of ZnSe on GaAs by MOCVDJapanese Journal of Applied Physics, 1985
- The MOCVD growth of ZnSe using Me2Zn, H2Se and SeEt2Journal of Crystal Growth, 1984
- High resolution transmission electron microscopy (HRTEM) of interfaces in epitaxial ZnSeyS1 − y grown by MOCVDJournal of Crystal Growth, 1984
- Growth temperature dependence of crystallographic and luminescent properties of ZnSxSe1−x (0 ⪕ x ⪕ 1) by low-pressure MOVPEJournal of Crystal Growth, 1984
- Growth and Properties of Undoped n-Type ZnSe by Low-Temperature and Low-Pressure OMVPEJapanese Journal of Applied Physics, 1984
- New and Simple MOCVD Technique Using Completely Gaseous MO-Sources Especially Useful for Growing Zn-Chalcogenide FilmsJapanese Journal of Applied Physics, 1984
- The use of heterocyclic compounds in the organometallic chemical vapour deposition of epitaxial ZnS, ZnSe and ZnOJournal of Crystal Growth, 1984
- Growth of ZnS by Metalorganic Chemical Vapor DepositionJapanese Journal of Applied Physics, 1983
- The organometallic chemical vapour deposition of ZnS and ZnSe at atmospheric pressureJournal of Crystal Growth, 1982
- Growth and characterization of undoped ZnSe epitaxial layers obtained by organometallic chemical vapour depositionThin Solid Films, 1978