Review: Sputtering mechanisms for amorphous and polycrystalline solids
- 1 January 1973
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science
- Vol. 8 (1), 123-135
- https://doi.org/10.1007/bf00755591
Abstract
No abstract availableKeywords
This publication has 28 references indexed in Scilit:
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