NMR Study of Compositional Inhomogeneities in Sputtered Co-Cr Films
- 1 June 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (6B), L1125
- https://doi.org/10.1143/jjap.30.l1125
Abstract
The development of compositional inhomogeneities in sputtered Co-22 at.% Cr films is studied as a function of substrate temperature using the spin-echo 59Co-NMR technique. It is observed that a highly Co-rich component grows as the substrate temperature increases from 30°C to 400°C. The Cr content of the Co-rich part in the film deposited at 400°C is estimated to be as low as 5-7 at.%. The results are consistent with the appearance of a clearly striped compositional microstructure which suggests compositional separation.Keywords
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