Dynamic range of 106 in depth profiling using secondary-ion mass spectrometry

Abstract

Limitations in dynamic range previously experienced in SIMS depth profiling are shown to be caused by neutral projectiles present in the primary ion beam. Dynamic ranges of about 10⁶ can be achieved if (i) the final section of the primary beam line and the sample are immersed in a UHV ambient (−6 Pa) and (ii) the beam traversing this region is deflected or offset from the gun axis so that energetic neutrals produced in the beam line do not hit the sample.