Alteration of Ni silicide formation by N implantation
- 15 January 1981
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 38 (2), 106-108
- https://doi.org/10.1063/1.92259
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- On the formation of Ni and Pt silicide first phase: The dominant role of reaction kineticsApplied Physics Letters, 1978
- Influence of the nature of the Si substrate on nickel silicide formed from thin Ni filmsThin Solid Films, 1976