Design of a laser-assisted tomographic atom probe at Münster University

Abstract

To benefit from the latest technical improvements in atom probe analysis, a new tomographic atom probe has been built at the University of Münster, Germany. The instrument utilizes a femtosecond laser system with a high repetition rate combined with the ability of using a micrometer-sized extraction electrode and a wide angle configuration. Since field evaporation is triggered by laser pulses instead of high-voltage pulses, the instrument offers the ability to expand the range of analyzedmaterials to poorly conducting or insulating materials such as oxides, glasses, ceramics, and polymeric materials. The article describes the design of the instrument and presents characterizing measurements on metals, semiconductors, and oxide ceramic.