Determination of the fluorine distribution in porous silicon using nuclear reaction, XPS and Auger analyses.
- 15 December 1983
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 218 (1-3), 481-484
- https://doi.org/10.1016/0167-5087(83)91025-6
Abstract
No abstract availableKeywords
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