A DC-contact MEMS shunt switch
- 7 August 2002
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Microwave and Wireless Components Letters
- Vol. 12 (6), 212-214
- https://doi.org/10.1109/lmwc.2002.1009998
Abstract
This paper presents the design, fabrication, and performance of a metal-to-metal contact micro-electro-mechanical (MEMS) shunt switch. The switch is composed of a fixed-fixed metal beam with two pull-down electrodes and a central DC-contact area. The switch is placed in an in-line configuration in a coplanar waveguide transmission line. This topology results in a compact DC-contact shunt switch and high isolation at 0.1-18 GHz. The isolation at MM-wave frequencies is limited by the inductance to ground and is -20 dB at 18 GHz. The application areas are in wireless communications and high-isolation switching networks for satellite systems.Keywords
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