A structure marker study for Pd2Si formation: Pd moves in epitaxial Pd2Si
- 15 January 1985
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 57 (2), 224-226
- https://doi.org/10.1063/1.334792
Abstract
A sample with the configuration Si (111)/single crystalline Pd2Si/polycrystalline Pd2Si/Pd is used to study the dominant moving species during subsequent Pd2Si formation by annealing at 275 °C. The interface between monocrystalline and polycrystalline Pd2Si is used as a marker to monitor the dominant moving species. The result shows that Pd is the dominant moving species in the monocrystal. offKeywords
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