Optical properties of aluminium oxide thin films prepared at room temperature by off-plane filtered cathodic vacuum arc system
- 1 January 2004
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 447-448 (2), 14-19
- https://doi.org/10.1016/j.tsf.2003.09.047
Abstract
No abstract availableKeywords
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