Textural Properties of Germanium Films

Abstract

The textural properties of thin germanium films vacuum evaporated onto hot fused-quartz substrates have been investigated in detail over the temperature range from ambient to 650°C. The strongest texture characteristic of these films is the [110], which is obtained at substrate temperatures as low as 175°C, and prevails up to about 350°C. For temperatures between 350° and 575°C, competition for growth occurs and the texture varies principally between being powder, [110] and [111]. Above 575°C the [111] texture becomes dominant.