Silicon and Silicon Dioxide Thermal Bonding
- 1 January 1987
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Silicon-to-silicon direct bonding methodJournal of Applied Physics, 1986
- Applications of Acoustic Microscopy in the Semiconductor IndustryPublished by Springer Nature ,1982
- Acoustic microscopy of interior planesApplied Physics Letters, 1979