X-ray diffraction determination of interfacial roughness correlation in SixGe1−x/Si and GaAs/AlxGa1−xAs superlattices
- 15 June 1992
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 60 (24), 2986-2988
- https://doi.org/10.1063/1.106784
Abstract
Vertically correlated roughness in SixGe1−x/Si and GaAs/AlxGa1−xAs superlattice films has been investigated. In all films, a significant fraction of the total roughness is correlated with lateral correlation lengths from ∼1000 to ∼4500 Å.Keywords
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