On the Origin of Oval Defect with Nucleus on Epilayers Grown by Molecular Beam Epitaxy
- 1 June 1986
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 25 (6R), 908-909
- https://doi.org/10.1143/jjap.25.908
Abstract
By careful cross-sectional and surface observations of an oval defect with a macroscopic nucleus on epilayers grown by molecular-beam epitaxy, the origin was identified to be macroscopic surface contamination.Keywords
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