The case for magnetically driven microactuators
- 1 June 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 33 (3), 207-220
- https://doi.org/10.1016/0924-4247(92)80168-3
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
- Integrated microelectromechanical systems: A perspective on MEMS in the 90sPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Magnetic micro-actuatorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Fabrication and testing of the planar magnetic micromotorJournal of Micromechanics and Microengineering, 1991
- High-energy product ThMn12 Sm-Fe-T and Sm-Fe permanent magnets synthesized as oriented sputtered filmsApplied Physics Letters, 1991
- Microfabricated actuator with moving permanent magnetPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1991
- Applications of magnetic levitation-based micro-automation in semiconductor manufacturingIEEE Transactions on Semiconductor Manufacturing, 1990
- Design considerations for micromachined electric actuatorsSensors and Actuators, 1988
- Design considerations for a practical electrostatic micro-motorSensors and Actuators, 1987
- Silicon as a mechanical materialProceedings of the IEEE, 1982
- Ueber die zum Funkenübergang in Luft, Wasserstoff und Kohlensäure bei verschiedenen Drucken erforderliche PotentialdifferenzAnnalen der Physik, 1889