Effect of electronic strain on the optically induced mechanical moment in silicon microstructures
- 15 May 1992
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 71 (10), 5242-5245
- https://doi.org/10.1063/1.350581
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Micro resonant force gaugesSensors and Actuators A: Physical, 1992
- Resonant silicon sensorsJournal of Micromechanics and Microengineering, 1991
- Effect of electronic strain on photoacoustic generation in siliconApplied Physics Letters, 1985
- Photostriction Effect in GermaniumPhysica Status Solidi (b), 1961