Resonant silicon sensors
- 1 June 1991
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 1 (2), 113-125
- https://doi.org/10.1088/0960-1317/1/2/004
Abstract
No abstract availableKeywords
This publication has 29 references indexed in Scilit:
- The application of fine-grained, tensile polysilicon to mechanicaly resonant transducersSensors and Actuators A: Physical, 1990
- Process Integration for active polysilicon resonant microstructuresSensors and Actuators, 1989
- Survey of quartz bulk resonator sensor technologiesIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1988
- Vibration analysis of micromechanical elementsSensors and Actuators, 1985
- Sensors with oscillating elementsJournal of Physics E: Scientific Instruments, 1985
- Resonator sensors-a reviewJournal of Physics E: Scientific Instruments, 1985
- Silicon as a mechanical materialProceedings of the IEEE, 1982
- 0n the Use of Resonant Diaphragms as FM Pressure TransducersIEEE Transactions on Industrial Electronics and Control Instrumentation, 1978
- Vibrator sensors for atmospheric pressure, temperature, and humidity measurementsThe Journal of the Acoustical Society of America, 1974
- The Resonistor: A Frequency Selective Device Utilizing the Mechanical Resonance of a Silicon SubstrateIBM Journal of Research and Development, 1968