Silicon pressure sensor integrates resonant strain gauge on diaphragm
- 1 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3), 146-150
- https://doi.org/10.1016/0924-4247(90)85028-3
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Three-dimensional micromachining of silicon pressure sensor integrating resonant strain gauge on diaphragmSensors and Actuators A: Physical, 1990
- Sensitivity and mode spectrum of a frequency-output silicon pressure sensorSensors and Actuators, 1988
- Novel optically excited resonant pressure sensorElectronics Letters, 1988
- Etched silicon vibrating sensorJournal of Physics E: Scientific Instruments, 1984
- Force Sensing Using Quartz Crystal Flexure ResonatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1984