Silicon diffusion through thin tungsten films on silicon, studied with Auger spectroscopy
- 31 December 1973
- journal article
- Published by Elsevier in Journal of Electron Spectroscopy and Related Phenomena
- Vol. 2 (3), 363-376
- https://doi.org/10.1016/0368-2048(73)80028-3
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Kinetics of Phase Change. I General TheoryThe Journal of Chemical Physics, 1939