Replications and analysis of microlens array fabricated by a modified LIGA process
- 22 February 2006
- journal article
- research article
- Published by Wiley in Polymer Engineering & Science
- Vol. 46 (4), 416-425
- https://doi.org/10.1002/pen.20466
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
- Microplastic Lens Array Fabricated by a Hot Intrusion ProcessJournal of Microelectromechanical Systems, 2004
- Physical modeling and analysis of microlens formation fabricated by a modified LIGA processJournal of Micromechanics and Microengineering, 2003
- A simple method for microlens fabrication by the modified LIGA processJournal of Micromechanics and Microengineering, 2002
- Fabrication and characterization of microlenses realized by a modified LIGA processPure and Applied Optics: Journal of the European Optical Society Part A, 1997
- Fabrication of microlenses by plasmaless isotropic etching combined with plastic mouldingSensors and Actuators A: Physical, 1996
- Microjet fabrication of microlens arraysIEEE Photonics Technology Letters, 1994
- The manufacture of microlenses by melting photoresistMeasurement Science and Technology, 1990
- Technique for monolithic fabrication of microlens arraysApplied Optics, 1988
- Production of separation-nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplasticsThe Science of Nature, 1982
- Second-Order Transition Temperatures and Related Properties of Polystyrene. I. Influence of Molecular WeightJournal of Applied Physics, 1950