Time-dependent solution of Boltzmann equation in rf plasmas: A comparison with the effective field approximation
- 1 March 1987
- journal article
- research article
- Published by Springer Nature in Plasma Chemistry and Plasma Processing
- Vol. 7 (1), 125-137
- https://doi.org/10.1007/bf01016003
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Main Features of the Electron Kinetics in Collision Dominated Steady‐State rf PlasmasAnnalen der Physik, 1985
- Ion dynamics of rf plasmas and plasma sheaths: A time-resolved spectroscopic studyJournal of Applied Physics, 1984
- Electron Kinetics of Weakly Ionized HF Plasmas I. Direct Treatment and Fourier ExpansionContributions to Plasma Physics, 1984
- Electron Kinetics of Weakly Ionized HF Plasmas. II. Decoupling in the Fourier Hierarchy and Simplified Kinetics at Higher FrequenciesContributions to Plasma Physics, 1984
- Electron energy distributions and excitation rates in high-frequency argon dischargesJournal of Physics D: Applied Physics, 1983
- Energy Distribution of Electrons in High Frequency Gas DischargesPhysical Review B, 1946
- Conduction and Dispersion of Ionized Gases at High FrequenciesPhysical Review B, 1946